Deposition of WNxCy thin films for diffusion barrier application using the dimethylhydrazido (2−) tungsten complex (CH3CN)Cl4W(NNMe2)
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Synthesis and characterization of diorganohydrazido(2-) tungsten complexes.
Diorganohydrazido(2-) complexes of tungsten (L)Cl4W(NNR2) [R2=Me2, Ph2, -(CH2)5-; L=CH3CN, pyridine] were synthesized by reacting the corresponding 1,1-diorganohydrazine with WCl6, followed by reaction with acetonitrile or pyridine. Crystallographic structure determination of (CH3CN)Cl4W(NNMe2) and (CH3CN)Cl4W(NNPh2) allows a comparison of the structural features of the diorganohydrazido(2-) fu...
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The tungsten piperidylhydrazido complex Cl4 CH3CN W N-pip 1 was used for film growth of tungsten carbonitride WNxCy by metal-organic chemical vapor deposition CVD in the absence and presence of ammonia NH3 in H2 carrier. The microstructure of films deposited with NH3 was x-ray amorphous between 300 and 450 °C. The chemical composition of films deposited with NH3 exhibited increased N levels and...
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In this study, a sol-gel peroxotungstic acid sol was employed to deposit tungsten oxide (WO3) films by the spin-coating technique. In view of smart window applications, electrochromic windows were then designed and fabricated using a thin tungsten oxide film. For this purpose, Glass/ FTO/ WO3/ electrolyte/ FTO/Glass could be of use due to its special structure that consists of an electrochromic...
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تاریخ انتشار 2009